Operating method and circuit arrangement for a capacitive micromechanical sensor with analog reset
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
May 8, 2012
Grant Date -
Jun 3, 2010
app pub date -
Mar 14, 2008
filing date -
Jun 15, 2007
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A method and a switch arrangement for operating a micromechanical capacitive sensor having at least one and at most two fixed electrodes and one differential capacitor formed by a movable central electrode that can be deflected by an external force, wherein the deflection of the electrode is measured. A fraction of the force acting on the central electrode, corresponding to the electrostatic restorative force, is compensated. Under closed-loop operation, a selection signal is influenced by a regulator supplementing a restore crosstalk signal so that the created capacitive restorative force acts in a compensatory manner against deflection of the central electrode.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully