Debris reduction in electron-impact X-ray sources
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United States of America Patent
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May 1, 2012
Grant Date -
Jun 4, 2009
app pub date -
May 8, 2007
filing date -
May 11, 2006
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Abstract
A method for generating x-ray radiation, comprising the steps of forming a target jet by urging a liquid substance under pressure through an outlet opening, the target jet propagating through an area of interaction; and directing at least one electron beam onto the target jet in the area of interaction such that the electron beam interacts with the target jet to generate x-ray radiation; wherein the full width at half maximum of the electron beam in the transverse direction of the target jet is about 50% or less of the target jet transverse dimension. A system for carrying out the method is also disclosed.
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