Method of curing color filter for electronic display using electron-beam and method of fabricating color filter for electronic display using the same
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United States of America Patent
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May 1, 2012
Grant Date -
Apr 29, 2010
app pub date -
Jan 30, 2009
filing date -
Oct 28, 2008
priority date (Note) -
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Abstract
Disclosed herein is a method of curing a color filter for an electronic display using an electron beam at low temperature. A conventional method of curing the color filter by thermal-heating is not suitable for a process of fabricating next generation flexible displays. In the method of the invention, after a color resist pattern is formed on a substrate, the resist is cured by an electron beam at 100° C. or less. Hence, the method can minimize damage of the substrate while facilitating dimension control of the color pattern and achieving precision of a fine pattern. A method of fabricating a color filter for an electronic display using the method is also disclosed.
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