Plasma generation system and plasma generation method

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United States of America Patent

PATENT NO 8168130
APP PUB NO 20100065415A1
SERIAL NO

11992007

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A method and system for surely and conveniently generating plasma in a narrow tube having a small diameter.

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Patent Owner(s)

Patent OwnerAddress
TOYO ADVANCED TECHNOLOGIES CO LTD5-3-38 UJINA-HIGASHI MINAMI-KU HIROSHIMA-SHI HIROSHIMA 734-8501

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kimura, Tatsuo Hiroshima, JP 46 439
Nakatani, Tatsuyuki Hiroshima, JP 14 107
Sato, Takehiko Sendai, JP 70 562

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