Device for clamping and positioning an evaporator boat

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 8168002
APP PUB NO 20090199767A1
SERIAL NO

11996640

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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The invention relates to a vacuum treatment plant comprising an evaporator (1) for vacuum coating facilities. The evaporator (1) according to the invention comprises a device for guiding a supply line (4) movable in a gripping direction (A) and intended for gripping and positioning an evaporation boat (3) having a base (22) and further comprises two spacers (18, 19) which the movable supply line (4) flexibly connects to the base (22), with the spacers (18, 19) being disposed on one side each with the movable supply line (4) and with the other side on the base (22), thus enabling the first supply line (4) to be forcibly guided, and with the spacers (18, 19) having such a length and configuration between the first supply line (4) and the base (22) that the guidance direction (B) is essentially parallel to the gripping direction (A) at least across a small deflection range of the spacers (18, 19).

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First Claim

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Patent Owner(s)

Patent OwnerAddress
APPLIED MATERIALS GMBH & CO KG63755 ALZENAU

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hein, Stefan Blankenbach, DE 51 329
Klein, Wolfgang Wörth, DE 75 740

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