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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
CARL ZEISS MICROSCOPY GMBH	CARL-ZEISS-PROMENADE 10 JENA 07745

International Classification(s)

• H01J:ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS

• [Classification Symbol]

• [Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Drexel, Volker	Koenigsbronn, DE	14	272
Irmer, Bernd	Munich, DE	5	8
Mantz, Ulrich	Schelklingen, DE	22	301
Penzkofer, Christian	Munich, DE	3	4

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Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
April 24, 2012	US,8164071,B2   US8164071B2	GRANTED PATENT AS SECOND PUBLICATION
April 01, 2010	US,20100078557,A1   US20100078557A1	FIRST PUBLISHED PATENT APPLICATION

Full Text

US Patent No: 8164071

Electron beam source and method of manufacturing the same

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