Apparatus for generating coarse-grained simulation image of sample to be measured with a probe of a scanning probe microscope
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United States of America Patent
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Apr 17, 2012
Grant Date -
Feb 18, 2010
app pub date -
Mar 29, 2007
filing date -
Sep 21, 2006
priority date (Note) -
Expired
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Abstract
A sample atomic configuration creation part in a control section creates the atomic arrangement data of a sample, and a sample surface height calculation part calculates a sample surface height for every mesh. A probe profile creation part creates the atomic arrangement data of a probe, and a probe surface height calculation part calculates the height of the probe surface for every mesh. A probe scanning part supplies the coordinate of a scanning start position in the scanning range to a collision height specification part. The collision height specification part calculates the distance between the sample surface and the probe in each mesh. Calculation of this distance is repeated for all meshes of the probe at the coordinate of this measuring position.
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