Pressure body and pellicle mounting apparatus
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United States of America Patent
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Apr 17, 2012
Grant Date -
Dec 9, 2010
app pub date -
Jun 3, 2009
filing date -
Jun 3, 2009
priority date (Note) -
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status (Latency Note)
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Abstract
A pressure body comprises: three or more pressure pins 40 that come into contact with a photomask 70 at downward positions in a pressure direction D; a main body 10 provided with an opening 16, the opening 16 supporting the pressure pins 40 so as to prevent the pins from dropping off downward, the opening 16 being able to change positions within a plane perpendicular to the pressure direction D, the pressure pins 40 being supported at said positions; a cover body 20 fixed to the main body 10 at an upward position in the pressure direction D; and a buffer member 30 located between the pressure pins 40 and the cover body 20 in the pressure direction D. The pressure body further comprises a cap pin 60, the cap pin 60 supported in the opening 16 so as to be prevented from dropping off downward, the cap pin 60 located in alignment with the pressure pins 40 so as to close off the opening 16, thereby preventing the buffer member 30 from being exposed downward.
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