Electrostatic chuck and electrode sheet for electrostatic chuck
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United States of America Patent
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Apr 17, 2012
Grant Date -
Feb 12, 2009
app pub date -
Jul 7, 2006
filing date -
Jul 8, 2005
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Abstract
An electrostatic chuck having excellent chucking force and holding force is provided. The electrostatic chuck includes a laminate structure in which a first insulating layer, a first electrode layer, an interelectrode insulating layer, a second electrode layer and a second insulating layer are successively laminated on a metal base in an order of increasing distance from the metal base. The second electrode layer includes a pattern electrode having a plurality of opening portions within a flat area, and a shortest distance X between mutually opening portions and a length L of a line segment formed by feet of perpendiculars when barycenters of the adjacent opening portions are projected to a virtual line which is a straight line parallel to the shortest distance X satisfy L/X≧1.5 and L<2.6 mm.
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