Ion implanting apparatus
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United States of America Patent
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-
Apr 10, 2012
Grant Date -
Apr 8, 2010
app pub date -
Aug 21, 2009
filing date -
Oct 3, 2008
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
An illuminating device includes: a light source which is disposed outside a vacuum chamber; a light guide which guides the light emitted from the light source, into the vacuum chamber; a light projecting portion which is fixed in the vacuum chamber, and which emits the light guided by the light guide; a light receiving portion which is attached to a support table of a holder driving device, and which receives the light emitted from the light projecting portion in a state where a holder is positioned in a notch detecting position; a light guide which guides the light received by the light receiving portion; and a light emitting device which is attached to the support table, and which irradiates an outer circumferential portion of a substrate with the light guided by the light guide.
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