Front plate for an ion source
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United States of America Patent
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Apr 10, 2012
Grant Date -
Nov 18, 2010
app pub date -
Feb 1, 2010
filing date -
Apr 28, 2006
priority date (Note) -
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status (Latency Note)
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Abstract
The present invention relates to a front plate for an ion source that is suitable for an ion implanter. The front plate according to the invention comprises obverse and reverse sides, an exit aperture for allowing egress of ions from the ion source that extends substantially straight through the front plate between the obverse and reverse sides, and a slot penetrating through the front plate from obverse side to reverse side at a slant for at least part of its depth, the slot extending from a side of the front plate to join the exit aperture. The slot is slanted to occlude line of sight into the ion source when viewed from in front, yet provides an expansion gap.
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