Back-end processes for substrates re-use
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United States of America Patent
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Apr 10, 2012
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N/A
app pub date -
Aug 17, 2010
filing date -
Aug 18, 2009
priority date (Note) -
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Abstract
A method for fabricating optical devices on a reusable handle substrate. The method includes providing a handle substrate having a surface region. The method also includes forming a plurality of optical device using at least an epitaxial growth process overlying the surface region and then releasing the handle substrate from the plurality of optical devices. The method reuses the handle substrate for another fabrication process.
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