AG-based alloy sputtering target
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
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Apr 10, 2012
Grant Date -
Mar 5, 2009
app pub date -
Aug 26, 2008
filing date -
Aug 29, 2007
priority date (Note) -
Expired
status (Latency Note)
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Abstract
The invention relates to an Ag-based alloy sputtering target including at least one element selected from the group consisting of Ti, V, W, Nb, Zr, Ta, Cr, Mo, Mn, Fe, Co, Ni, Cu, Al, and Si in a total amount of 1 to 15% by weight, in which the Ag-based alloy sputtering target has an arithmetic mean roughness (Ra) of 2 μm or more and a maximum height (Rz) of 20 μm or more at a sputtering surface thereof.
First Claim
all claims..Other Claims data not available
Family

- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | |
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SONY DADC CORPORATION | 1-12 KITASHINAGAWA 5-CHOME SHINAGAWA-KU TOKYO |
International Classification(s)

- 2008 Application Filing Year
- C23C Class
- 1299 Applications Filed
- 709 Patents Issued To-Date
- 54.59 % Issued To-Date
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
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Matsuzaki, Hitoshi | Hyogo, JP | 17 | 178 |
# of filed Patents : 17 Total Citations : 178 | |||
Okawa, Naoki | Tokyo, JP | 11 | 31 |
# of filed Patents : 11 Total Citations : 31 | |||
Tauchi, Yuki | Hyogo, JP | 31 | 190 |
# of filed Patents : 31 Total Citations : 190 |
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Patent Citation Ranking
- 1 Citation Count
- C23C Class
- 4.98 % this patent is cited more than
- 13 Age
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Maintenance Fees
Fee | Large entity fee | small entity fee | micro entity fee | due date |
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Fee | Large entity fee | small entity fee | micro entity fee |
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Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |
Full Text

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Date | Code | Event | Description |
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Feb 12, 2021 | MAFP | MAINTENANCE FEE PAYMENT | free format text: PAYMENT OF MAINTENANCE FEE, 4TH YEAR, LARGE ENTITY (ORIGINAL EVENT CODE: M1551); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY year of fee payment: 4 |
Nov 21, 2017 | I | Issuance | |
Nov 01, 2017 | STCF | INFORMATION ON STATUS: PATENT GRANT | free format text: PATENTED CASE |
Jan 07, 2016 | P | Published | |
Apr 21, 2015 | F | Filing | |
Apr 21, 2015 | AS | ASSIGNMENT | free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:XU, HUA AN;WANG, QIANG;REEL/FRAME:035466/0138 Owner name: MERIDIAN INTERNATIONAL CO., LTD., CHINA Effective Date: Apr 21, 2015 |
Jul 04, 2014 | PD | Priority Date |

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