Centripetal pumping stage and vacuum pump incorporating such pumping stage
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United States of America Patent
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Apr 10, 2012
Grant Date -
Jun 24, 2010
app pub date -
Dec 24, 2008
filing date -
Dec 24, 2008
priority date (Note) -
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Abstract
A molecular spiral-type vacuum pumping stage comprises a rotor disk having smooth surfaces cooperating with a stator. The stator is provided with a plurality of spiral channels at least on the surface facing the rotor disk, wherein the gas to be pumped flows in centripetal direction. The cross-section area (σ) of the channels is reduced from the center towards the outer periphery of the stator. Due to this arrangement, it is possible to avoid the reduction of the internal gas flow velocity along the pumping stage and the related risk of internal compression or re-expansions, this limiting the power losses. The present invention also refers to a vacuum pump comprising at least one pumping stage as described above.
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