MEMS scan controller generating clock frequency and control method thereof
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United States of America Patent
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Mar 27, 2012
Grant Date -
Jun 2, 2011
app pub date -
Oct 20, 2008
filing date -
Dec 31, 2007
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Expired
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Abstract
A Micro Electronic Mechanical System (MEMS) scan controller generating clock frequency and a control method thereof are disclosed. The MEMS scan controller is for a MEMS mirror in a bi-direction laser scanning units (LSU). By detecting resonant frequency of the MEMS mirror, the scan controller sends frequency modulation signal and amplitude modulation signal of the MEMS mirror to a bridge circuit of the MEMS mirror for adjusting and stabilizing the MEMS mirror. A clock signal corresponding to the resonant frequency of the MEMS mirror at the moment is also sent so that scan data is sent within the effective scanning window in forward direction/reverse direction. Thus high-precision scanning is achieved.
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