Chloride analysis in acid copper plating baths
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United States of America Patent
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Mar 27, 2012
Grant Date -
Mar 12, 2009
app pub date -
Sep 6, 2007
filing date -
Sep 6, 2007
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Abstract
The chloride concentration in an acid copper plating bath is determined from the chloride oxidation current measured under controlled hydrodynamic conditions at a noble metal electrode using specific voltammetric parameters. The measurement is made directly on the undiluted plating bath so that the chloride measurement is fast and no waste stream is generated.
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