Purification of fluorine containing gases and systems and materials thereof
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United States of America Patent
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Mar 27, 2012
Grant Date -
Oct 8, 2009
app pub date -
Mar 26, 2009
filing date -
Mar 26, 2008
priority date (Note) -
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Abstract
A method of reducing moisture in a fluorine-containing gas is described. The method may include the steps of providing a purifier material that includes elemental carbon, and flowing the unpurified fluorine-containing gas having an unpurified moisture concentration over or through the carbon-based purifier material. At least a portion of the moisture is captured in the purifier material so that a purified fluorine-containing gas that emerges downstream of the purifier material has a reduced moisture concentration that is about 50% or less of the unpurified moisture concentration.
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