Magnetic shunts in tubular targets
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United States of America Patent
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-
Mar 20, 2012
Grant Date -
Jun 4, 2009
app pub date -
Nov 25, 2008
filing date -
Nov 29, 2007
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A sputter target has a carrier body and a target material arranged on the carrier body, wherein the carrier body has a rear surface facing away from the target material and the target material has a front surface facing away from the carrier body. A ferromagnetic material is arranged between the front surface and the rear surface.
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