Inner plate and crucible assembly for deposition having the same
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United States of America Patent
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Mar 20, 2012
Grant Date -
Feb 25, 2010
app pub date -
Dec 29, 2008
filing date -
Aug 22, 2008
priority date (Note) -
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Abstract
A crucible assembly for deposition and an inner plate used in the crucible assembly. The crucible assembly includes a main body having an inner space accommodating a deposition material and an opening arranged at an upper portion of the inner space, a cap having an aperture arranged at a top of the main body and combined with the main body and an inner plate arranged between the main body and the cap, the inner plate covering the opening of the main body, the crucible assembly including inner channels arranged to allow vapor of the deposition material from the inner space of the main body to be expelled to an outside of the aperture in the cap via a space arranged between an outer side surface of the inner plate and an inner side surface of the cap.
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