Plasma treatment apparatus and plasma treatment method
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United States of America Patent
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Mar 20, 2012
Grant Date -
Sep 22, 2005
app pub date -
Mar 17, 2005
filing date -
Mar 19, 2004
priority date (Note) -
Expired
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Abstract
A plasma treatment apparatus generates a plasma in a treatment vessel by an electromagnetic wave radiated from an electromagnetic wave radiation portion into the treatment vessel to perform plasma treatment by the plasma. At least a part of a wall constituting the treatment vessel includes at least a part of an electromagnetic wave transmission path which transmits the electromagnetic wave.
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