Mirror device
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United States of America Patent
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-
Mar 13, 2012
Grant Date -
May 27, 2010
app pub date -
Jan 22, 2010
filing date -
Aug 30, 2006
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A mirror device comprises: an electrode which is covered with a protective film made of a material containing a semiconductor material and is placed on a substrate; a mirror placed above the electrode; and an electrically conductive hinge placed between the mirror and the electrode, wherein an opening part is formed in a part of the protective film, and the hinge penetrates the protective film in the opening part thereof.
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