Method of evaluating a film
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United States of America Patent
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Mar 6, 2012
Grant Date -
Jul 31, 2008
app pub date -
Dec 26, 2007
filing date -
Dec 25, 2006
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Abstract
A method of directly measuring hydrogen permeability of a film is provided. The method of evaluating a film includes acquiring, with respect to a specimen including a plurality of films stacked on each other, ion dose-dependence data of intensity of γ-beam generated by hydrogen resonant nuclear reaction, and fitting the data with a functional equation of the ion dose.
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