Importance

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Abstract

A plasma reactor has high durability with performance to generate stable and uniform plasma. The reactor has a variety of advantages such as increasing the range of commercial applications since the reactor has a structure that allows simple and efficient installation and operation in a system at a position required by the system. The reactor includes a stack constructed by sequentially stacking plus and minus electrodes and spacers and a reactor body provided at one side of the stack to hold the stack. The plus and minus electrodes are arranged alternately with spacers to define passages through which gas is allowed to pass. Each of the plus and minus electrodes has deformation preventing means to disperse stress of the electrodes and to prevent a local thermal stress caused by thermal expansion and contraction, thereby increasing thermal shock-resistant performance. External terminals for connection to the plus and minus electrodes are provided on the reactor body. A projection is formed on a surface of the reactor body in a direction perpendicular to a stack direction of the stack to allow the reactor to be easily fixed to a case.

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First Claim