Line narrowing module

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United States of America Patent

PATENT NO 8126027
APP PUB NO 20110194580A1
SERIAL NO

13086858

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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An apparatus is disclosed which may comprise a grating receiving light, a first prism moveable to coarsely select an angle of incidence of the light on the grating, and a second prism moveable to finely select an angle of incidence of the light on the grating. In one application, the apparatus may be used as a line narrowing module for a laser light source.

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Patent Owner(s)

  • CYMER, INC.

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Algots, J Martin San Diego, US 14 344
Bergstedt, Robert A Carlsbad, US 23 548
Partlo, William N Poway, US 183 6942
Rylov, German E Poway, US 10 140
Sandstrom, Richard L Encinitas, US 136 5606

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