Vibration sensor, suspension, head gimbal assembly and manufacturing method thereof, and disk drive unit including the same
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United States of America Patent
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Feb 28, 2012
Grant Date -
Oct 14, 2010
app pub date -
Apr 14, 2009
filing date -
Apr 14, 2009
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A vibration sensor for a slider includes a base portion, a loading portion adapted for supporting the slider mounted thereon and formed within the base portion, and at least two connection arms connecting the base portion with the loading portion. The vibration sensor of the present invention can sensitively sense a vibration of the slider, thus maintaining the flying height of the slider, and finally improving the performance thereof. The invention also discloses a suspension, a head gimbal assembly and a manufacturing method thereof, and a disk drive unit including the same.
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