Increasing current in charged particle sources and systems
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United States of America Patent
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Feb 28, 2012
Grant Date -
Jan 21, 2010
app pub date -
Jun 29, 2009
filing date -
Jul 16, 2008
priority date (Note) -
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Abstract
Disclosed are charged particle systems that include a tip, at least one gas inlet configured to supply gas particles to the tip, and a element having a curved surface positioned to adsorb un-ionized gas particles, and to direct desorbing gas particles to propagate toward the tip. The charged particle systems can include a field shunt connected to the tip, and configured to adjust an electric field at an apex of the tip.
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