Electrolytic copper process using anion permeable barrier
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
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Feb 28, 2012
Grant Date -
Mar 29, 2007
app pub date -
May 3, 2006
filing date -
Apr 13, 1999
priority date (Note) -
In Force
status (Latency Note)
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Abstract
Processes and systems for electrolytically processing a microfeature workpiece with a first processing fluid and an anode are described. Microfeature workpieces are electrolytically processed using a first processing fluid, an anode, a second processing fluid, and an anion permeable barrier layer. The anion permeable barrier layer separates the first processing fluid from the second processing fluid while allowing certain anionic species to transfer between the two fluids. The described processes produce deposits over repeated plating cycles that exhibit resistivity values within desired ranges.
First Claim
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Family

- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | |
---|---|---|
APPLIED MATERIALS INC | 3050 BOWERS AVENUE SANTA CLARA CA 95054 |
International Classification(s)

- 2006 Application Filing Year
- C25D Class
- 242 Applications Filed
- 119 Patents Issued To-Date
- 49.18 % Issued To-Date
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
---|---|---|---|
Baskaran, Rajesh | Kalispell, US | 27 | 85 |
# of filed Patents : 27 Total Citations : 85 | |||
Batz,, Jr Robert W | Kalispell, US | 8 | 24 |
# of filed Patents : 8 Total Citations : 24 | |||
Hanson, Kyle M | Kalispell, US | 157 | 2514 |
# of filed Patents : 157 Total Citations : 2514 | |||
Kim, Bioh | Kalispell, US | 22 | 93 |
# of filed Patents : 22 Total Citations : 93 | |||
Klocke, John L | Kalispell, US | 47 | 163 |
# of filed Patents : 47 Total Citations : 163 | |||
Ritzdorf, Tom L | Bigfork, US | 19 | 157 |
# of filed Patents : 19 Total Citations : 157 |
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Patent Citation Ranking
- 1 Citation Count
- C25D Class
- 8.95 % this patent is cited more than
- 13 Age
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Maintenance Fees
Fee | Large entity fee | small entity fee | micro entity fee | due date |
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Fee | Large entity fee | small entity fee | micro entity fee |
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Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |
Full Text

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Oct 15, 2018 | STCH | INFORMATION ON STATUS: PATENT DISCONTINUATION | free format text: PATENT EXPIRED DUE TO NONPAYMENT OF MAINTENANCE FEES UNDER 37 CFR 1.362 |
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Sep 09, 2018 | FP | LAPSED DUE TO FAILURE TO PAY MAINTENANCE FEE | Effective Date: Sep 09, 2018 |
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Sep 09, 2014 | I | Issuance | |
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Jan 31, 2008 | P | Published | |
Jul 28, 2006 | F | Filing | |
Jul 28, 2006 | PD | Priority Date | |
Jul 26, 2006 | AS | ASSIGNMENT | free format text: CORRECTIVE ASSIGNMENT TO CORRECT THE ASSIGNEE PREVIOUSLY RECORDED ON REEL 018140 FRAME 0259;ASSIGNOR:VARNER, MICHAEL G.;REEL/FRAME:018267/0067 Owner name: ALSTOM TECHNOLOGY LTD, SWITZERLAND Effective Date: Jul 26, 2006 |
Jul 26, 2006 | AS | ASSIGNMENT | free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:VARNER, MICHAEL G.;REEL/FRAME:018140/0259 Owner name: ALSTOM TECHNOLOGY LTD., SWITZERLAND Effective Date: Jul 26, 2006 |

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