Method and apparatus for MEMS oscillator
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United States of America Patent
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Feb 21, 2012
Grant Date -
Mar 10, 2011
app pub date -
Nov 12, 2010
filing date -
Dec 5, 2006
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Abstract
A resonator includes a CMOS substrate having a first electrode and a second electrode. The CMOS substrate is configured to provide one or more control signals to the first electrode. The resonator also includes a resonator structure including a silicon material layer. The resonator structure is coupled to the CMOS substrate and configured to resonate in response to the one or more control signals.
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