Coordinate measuring machine and method for calibrating the coordinate measuring machine

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United States of America Patent

PATENT NO 8115808
APP PUB NO 20090002486A1
SERIAL NO

12215115

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Abstract

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A coordinate measuring machine is disclosed having an orientor automatically orienting a substrate associated therewith. A control and computing unit is further associated with the coordinate measuring machine, so that self-calibration may be performed on the basis of at least two different and automatically set orientations of the substrate.

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Patent Owner(s)

Patent OwnerAddress
VISTEC SEMICONDUCTOR SYSTEMS GMBH35781 WEILBURG

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Czerkas, Slawomir Weilburg, DE 8 26
Fricke, Wolfgang Netphen, DE 6 48
Rinn, Klaus Heuchelheim, DE 23 258

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