Horizontal nanotube/nanofiber growth method
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United States of America Patent
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Feb 14, 2012
Grant Date -
Aug 27, 2009
app pub date -
Dec 19, 2008
filing date -
Dec 20, 2007
priority date (Note) -
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Abstract
A method for forming a nanotube/nanofiber growth catalyst on the sides of portions of a layer of a first material, comprising the steps of depositing a thin layer of a second material; opening this layer at given locations; depositing a very thin catalyst layer; depositing a layer of the first material over a thickness greater than that of the layer of the second material; eliminating by chem./mech. polishing the upper portion of the structure up to the high level of the layer of the second material; and eliminating the second material facing selected sides of the layer portions of the first material.
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