Method of and apparatus utilizing carbon cord for evaporation of metals

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United States of America Patent

PATENT NO 8114339
APP PUB NO 20110206865A1
SERIAL NO

12712043

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Abstract

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A high temperature evaporator is made using an electrically insulating crucible and a heating element made of woven graphite fibers. The crucible is manufactured out of an electrically insulating block to the required shape, and channels are machined on the walls of the crucible. The woven graphite cord is threaded through the channels and is used as heating elements. Since the heating cords are made of woven graphite, they are very flexible and do not embrittle. They can be manufactured to various resistivity as needed, allowing for relatively inexpensive power supplies and low current power delivery. The cords are not fragile and do not break due to thermal shock or vibration.

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Patent Owner(s)

Patent OwnerAddress
INTEVAC INC3560 BASSETT STREET SANTA CLARA CA 95054

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bluck, Terry Santa Clara, US 86 2628
Wall, Arthur C Morgan Hill, US 10 15

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