Substrate for epitaxy and method of preparing the same
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United States of America Patent
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Feb 7, 2012
Grant Date -
Dec 18, 2008
app pub date -
Jun 16, 2008
filing date -
Dec 11, 2002
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or less. Therefore, the template type substrate has a good dislocation density and a good value of FWHM of the X-ray rocking curve from (0002) plane less than 80, so that the resulting template type substrate is very useful for the epitaxy substrate from gaseous phase such as MOCVD, MBE and HVPE, resulting in possibility of making good opto-electric devices such as Laser Diode and large-output LED and good electric devices such as MOSFET.
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