Miniature acceleration sensor
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United States of America Patent
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Jan 31, 2012
Grant Date -
Jun 3, 2010
app pub date -
Aug 6, 2007
filing date -
Aug 7, 2006
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A miniature sensor for detecting acceleration and deceleration processes has at least one bar-like spring element which is formed by a nanowire, which is connected by one end to the detector substrate and projects from the latter and which preferably carries at its free end a coating emitting a permanent magnetic stray field, or a nanoparticle of this type, wherein the nanowire and magnetic stray field coating, or mass, together form the inertial mass. A magnetic field detection layer composed, for example, of magnetoresistive material, is disposed at least in the region near the connected end of the nanowire. The substrate is preferably provided with such a layer which preferably, for its part, as sensor component forms a constituent part of a magnetic field detection unit.
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