Positioning device to position one or more plates of electronic circuits, in a metal deposition unit

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 8104168
APP PUB NO 20090265926A1
SERIAL NO

12256707

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Abstract

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A positioning device to position one or more plates of electronic circuits with respect to an operating unit. The device comprises a rotary member which rotates selectively between a first operating position and a second operating position, and a positioning member mounted on the rotary member. The positioning member comprises a frame, which is mounted removably on the rotary member, and a strip of transpirant material on which each plate is rested. The strip is wound between a pair of winding/unwinding rollers, pivoted on the frame. The positioning member also comprises heating means able to heat the wafer to take it to a determinate operating temperature.

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Patent Owner(s)

  • APPLIED MATERIALS ITALIA S.R.L.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Baccini, Andrea San Biagio di Callalta, IT 45 203

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