Multi-chamber gas discharge laser bandwidth control through discharge timing
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United States of America Patent
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Jan 24, 2012
Grant Date -
Dec 9, 2010
app pub date -
Aug 10, 2010
filing date -
Aug 29, 2001
priority date (Note) -
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Abstract
A method and apparatus are disclosed for controlling bandwidth in a multi-portion laser system comprising a first line narrowed oscillator laser system portion providing a line narrowed seed pulse to an amplifier laser system portion, may comprise utilizing a timing difference curve defining a relationship between a first laser system operating parameter other than bandwidth and the timing difference and also a desired point on the curve defining a desired timing difference, wherein each unique operating point on the curve corresponds to a respective bandwidth value; determining an actual offset from the timing difference at the desired point on the curve to an actual operating point on the curve; determining an error between the actual offset and a desired offset corresponding to a desired bandwidth; modifying the firing differential timing to remove the error between the actual offset and the desired offset.
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