Optical inspection system and method
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United States of America Patent
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Jan 24, 2012
Grant Date -
Feb 24, 2011
app pub date -
Oct 29, 2010
filing date -
Apr 4, 2008
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Abstract
An inspection system includes optics, an object support for mounting an object in a region of an object plane of the optics, a bright-field light source, and a dark-field light source. The inspection system also includes an image detector having a radiation sensitive substrate disposed in a region of an image plane of the optics and a beam dump.
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