Scanning probe microscope with automatic probe replacement function

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 8099793
APP PUB NO 20100037360A1
SERIAL NO

12569680

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Abstract

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An automatic probe exchange system for a scanning probe microscope (SPM) exchanges probes between a probe mount on the SPM and a probe mount on a probe tray based on differential magnetic force. When the magnetic force on the SPM side is greater, the probe is attached to the probe mount on the SPM. When the magnetic force on the probe tray side is greater, the probe is attached to the probe mount on the probe tray. The magnetic force on the probe tray side is varied by moving the magnets that generate the magnetic force on the probe tray side closer to or further from the probe.

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Patent Owner(s)

Patent OwnerAddress
PARK SYSTEMS CORPKANC 4TH FLOOR 109 GWANGGYO-RO YEONGTONG-GU SUWON-SI GYEONGGI-DO 16229

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Jo, Hyeong Chan Suwon, KR 2 22
Kim, Joon Hui Seoul, KR 2 22
Kim, Yong Seok Seoul, KR 130 576
Lim, Hong Jae Suwon, KR 2 22
Park, Sang-il Seongnam, KR 220 5653
Shin, Seung Jun Seoul, KR 10 52

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