Silicon resonator of the tuning-fork type
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United States of America Patent
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Jan 17, 2012
Grant Date -
Jan 21, 2010
app pub date -
Oct 8, 2007
filing date -
Oct 9, 2006
priority date (Note) -
Expired
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Abstract
The invention relates to a silicon resonator (10) of the tuning-fork type in which the linear frequency drift depending on the temperature is compensated. The resonator includes a silicon base (14), a plurality of parallel arms (11, 12, 13) capable of vibrating and actuator (18, 21, 22), wherein the arms include a silicon layer provided between two layers of silicon oxide having a thickness, relative to that of the silicon layer, such that it ensures the first-order compensation of the resonator thermal drift.
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