System and method for the manufacture of semiconductor devices by the implantation of carbon clusters

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United States of America Patent

PATENT NO 8097529
SERIAL NO

12508800

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Abstract

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. Upon subsequent annealing and activation, the boron diffusion is reduced, due to the gettering of interstitial defects by the carbon atoms.

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Patent Owner(s)

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SEMEQUIP INC34 SULLIVAN ROAD UNIT #21 BILLERICA MA 01862

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Horsky, Thomas N Boxborough, US 57 2744
Krull, Wade A Marblehead, US 14 502

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