Methods for cleaning process kits and chambers, and for ruthenium recovery
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United States of America Patent
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Jan 17, 2012
Grant Date -
Aug 6, 2009
app pub date -
Dec 18, 2008
filing date -
Dec 19, 2007
priority date (Note) -
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Abstract
A method is provided for recovering a metal from electronic device deposition equipment including: providing deposition equipment wherein the deposition equipment is at least partially coated with a deposited metal; blasting the deposition equipment with a grit to remove at least some of the deposited metal to form a blasted grit and a removed metal; and separating at least some of the removed metal from the blasted grit to form a recovered metal.
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