Ion beam stabilization

United States of America Patent

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Jan 10, 2012
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Mar 4, 2010
app pub date
Aug 27, 2009
filing date
Aug 29, 2008

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Ion microscope methods and systems are disclosed. In general, the systems and methods provide high ion beam stability.

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Patent Owner	Address
CARL ZEISS NTS LLC	615 SOUTH DUPONT HIGHWAY DOVER DE 19901-4517

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H01J:ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS

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Inventor Name	Address	# of filed Patents	Total Citations
Farkas,, III Louis S	Durham, US	24	787
Notte,, IV John A	Gloucester, US	46	887
Rahman, FHM-Faridur	Peabody, US	7	51

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Ion beam stabilization

Number of patents in Portfolio can not be more than 2000

United States of America Patent

12548764

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PATENT NO	8093563
APP PUB NO	20100051805A1
SERIAL NO	12548764
DOCKET NO

US Family Size	Non-US Coverage
Patent Longevity	Forward Citations

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
January 10, 2012	US,8093563,B2 US8093563B2	GRANTED PATENT AS SECOND PUBLICATION
March 04, 2010	US,20100051805,A1 US20100051805A1	FIRST PUBLISHED PATENT APPLICATION

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12548764

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