System and method of measuring probe float
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United States of America Patent
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Jan 3, 2012
Grant Date -
Dec 23, 2010
app pub date -
Dec 15, 2009
filing date -
Mar 14, 2003
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A system and method allow accurate calculation of probe float through optical free-hanging and electrical planarity measurement techniques. In accordance with an examplary embodiment, probe float may be determined by acquiring a free-hanging planarity measurement, obtaining a first electrical contact planarity measurement, and calculating probe float using results of the acquiring and the obtaining operations.
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