Method and apparatus for the treatment of objects, in particular for the cleaning of semiconductor elements
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United States of America Patent
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Jan 3, 2012
Grant Date -
Nov 13, 2008
app pub date -
Mar 15, 2006
filing date -
Mar 15, 2005
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Abstract
The invention relates to the continuous cleaning of objects, in particular of semiconductor elements, using ultrasound, wherein the objects to be cleaned are arranged within a liquid. Furthermore, the present invention relates to an apparatus for carrying out the method according to the invention.).
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