Chemical liquid supplying apparatus
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United States of America Patent
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-
Jan 3, 2012
Grant Date -
May 14, 2009
app pub date -
Apr 6, 2006
filing date -
Apr 13, 2005
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A chemical liquid supplying apparatus 10 has a bellows 11, which includes a small-size bellows portion 13, a large-size bellows portion 14 with a larger volume change per axial-directional unit displacement amount than that of the small-size bellows portion 13, and a drive portion 12 therebetween. An apparatus main body 10a to which the bellows 11 is attached includes a supporting member 21 to which a fixed end portion 15 of the bellows 11 is attached and a supporting member 22 to which a fixed end portion 16 of the bellows 11 is attached. A drive sleeve 27 surrounds the bellows 11 and is rotatably supported on the apparatus main body 10a. A driven cylinder body 32 attached to the drive portion 12 converts rotation of the drive sleeve 27 to axial-directional movement of the drive portion 12.
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