Illumination means and inspection means having an illumination means

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 8087799
APP PUB NO 20090086483A1
SERIAL NO

12286253

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Abstract

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An illumination mean for the inspection of flat substrates is disclosed. The flat substrate includes an upper edge area, a lower edge area and a front area. The illumination means is formed as an annular segment and comprises an opening into which at least the edge area of the flat substrate extends. A plurality of light sources are arranged on an annular segment in a housing. Inside the housing, a reflective element is provided so that the light from the light sources does not impinge perpendicularly on the upper edge area, the lower edge area and the front area of the flat substrate.

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Patent Owner(s)

Patent OwnerAddress
VISTEC SEMICONDUCTOR SYSTEMS GMBH35781 WEILBURG

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hahn, Kurt Giessen, DE 3 27
Hofmann, Michael Heuchelheim, DE 90 743
Krampe-Zadler, Christof Castrio-Rauxel, DE 8 42

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