System, method, and apparatus for scanning detector for fast and frequent illumination uniformity correction module

United States of America Patent

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Dec 27, 2011
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May 3, 2007
app pub date
Oct 27, 2005
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Oct 27, 2005

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Expired

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Abstract

Provided is a reticle masking blade system, including a reticle-masking blade device. Also included is a detector array mounted on an edge of a blade of the blade device.

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Patent Owner	Address
ASML HOLDING N V	HOLLAND WEIDE EINDHOVEN VELDHOVEN NORTH BRABANT

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G03B:APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS O....

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Inventor Name	Address	# of filed Patents	Total Citations
Hult, David A	Danbury, US	5	30

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System, method, and apparatus for scanning detector for fast and frequent illumination uniformity correction module

Number of patents in Portfolio can not be more than 2000

United States of America Patent

11259088

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PATENT NO	8085383
APP PUB NO	20070097345A1
SERIAL NO	11259088
DOCKET NO

US Family Size	Non-US Coverage
Patent Longevity Expired	Forward Citations

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
December 27, 2011	US,8085383,B2 US8085383B2	GRANTED PATENT AS SECOND PUBLICATION
May 03, 2007	US,20070097345,A1 US20070097345A1	FIRST PUBLISHED PATENT APPLICATION

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11259088

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