Drop coating apparatus
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United States of America Patent
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Dec 20, 2011
Grant Date -
Dec 24, 2009
app pub date -
Apr 16, 2007
filing date -
Apr 19, 2006
priority date (Note) -
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Abstract
A droplet applying apparatus includes a base 11 having a mounting surface 11a on which a substrate 10 is to be mounted, an arm part 4 which is fitted to the base 11 so as to be movable relative to the base 11 in an arrow A direction, a plurality of droplet ejecting sections 6 which are fitted to the arm part 4 so as to be movable relative to the base 11 in an arrow B direction and which eject droplets to the substrate 10 mounted on the mounting surface 11a, image pickup parts 90 for detecting alignment marks 110 of the substrate 10 mounted on the mounting surface 11a, and a attitude adjustment member 12 for adjusting an attitude of the substrate 10 mounted on the mounting surface 11a based on a detection result of the image pickup parts 90.
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