Apparatus and method for a combined interferometric and image based geometric determination, particularly in the microsystem technology
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United States of America Patent
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Dec 6, 2011
Grant Date -
Mar 5, 2009
app pub date -
Oct 27, 2008
filing date -
May 8, 2006
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Abstract
The apparatus and method according to the invention includes an objective (8) which is capable of operating basically in two different measuring modes. In a first interference mode, a measuring object (9) is interference--optically measured. In a second imaging operating mode on a detector array (12) designed like a camera, an optical image is generated, which is supplied to an image processing routine. The switching over between the two operating modes occurs by switching the illumination devices which are associated with different locations of the beam path of the apparatus--when viewed from the camera, one in front of a beam divider and the other behind the beam divider, which couples a reference light path to the beam path.
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