Magnetic deflector for an electron column
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United States of America Patent
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Dec 6, 2011
Grant Date -
Jun 17, 2010
app pub date -
May 15, 2008
filing date -
May 15, 2007
priority date (Note) -
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Abstract
The present invention relates, in general, to a deflector for microcolumns for generating electron beams, and, more particularly, to a deflector capable of scanning or shifting electron beams or functioning as a stigmator using a magnetic field. The deflector (100) according to the present invention includes one or more deflector electrodes. Each of the deflector electrodes includes a core (12) made of a conductor or a semiconductor, and a coil (11) wound around the core (12).
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