Portable electron microscope using micro-column
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United States of America Patent
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Dec 6, 2011
Grant Date -
Dec 25, 2008
app pub date -
Sep 1, 2005
filing date -
Sep 1, 2004
priority date (Note) -
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Abstract
Provided is a portable electron microscope using a microcolumn. The portable electron microscope includes a microcolumn, a low vacuum pump, a high vacuum pump, an ultra-high vacuum ion pump, a first chamber for receiving and fixing the microcolumn and a sample to be measured and forming a vacuum by means of the pumps, a controller, and a case for receiving the pumps, the chamber and the controller.
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